Product details

High accuracy metering pump

Model/style: PD series
Type: Photoresist liquid compatible
High accuracy metering type
Product information: This pump provides high chemical resistance, heat resistance and cleanliness, because all wetted parts are made of Fluorocarbon polymers.
High accuracy chemical fluid application(Repeatability: ±0.005 mL)
Maximum fluid viscosity: 1000cP
Main constituent materials: Liquid contact part: PFA, PTFE
Main applications: For Coater Developer Equipment
For refilling chemicals into chemical feed unit and cleaning systems
Specifications: Fluid: Photoresists and Pure water
Liquid temperature during operation: 20 to 40°C
Maximum fluid viscosity: 1000cP
Max discharge pressure: 0.50MPaG
Max discharge capacity: 10mL/shot
Repeatability: ±0.005 mL
Equipped with pressure sensor

※Read the operation manual before use.
Product category: Fluororesin products／Bellows pumps

High accuracy metering pump PD-1000R

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