For CMP process/slurry
This pump provides high chemical resistance, heat resistance and cleanliness, because all wetted parts are made of Fluorocarbon polymers.
The PC series has been designed to cope with CPM process and slurry-contained applications.
Liquid contact part: PFA, PTFE
Circulation line for chemical feed unit, cleaning systems, and CMP unit handling fluid that contains slurry
Liquid temperature during operation: 10 to 100°C
Maximum discharge capacity: 12, 24, 48L/min
Supply air pressure: 0.2 to 0.5 MPaG
※Read the operation manual before use.
Fluororesin products／Bellows pumps