Product details

Slurry pump

Model/style: PC series
Type: For CMP process/slurry
Product information: This pump provides high chemical resistance, heat resistance and cleanliness, because all wetted parts are made of Fluorocarbon polymers.

The PC series has been designed to cope with CPM process and slurry-contained applications.
Main constituent materials: Liquid contact part: PFA, PTFE
Main applications: Circulation line for chemical feed unit, cleaning systems, and CMP unit handling fluid that contains slurry
Specifications: Liquid temperature during operation: 10 to 100°C
Maximum discharge capacity: 12, 24, 48L/min
Supply air pressure: 0.2 to 0.5 MPaG

※Read the operation manual before use.
Product category: Fluororesin products／Bellows pumps